Wetzig, Klaus: search on Z-Library

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1

Correlation of electromigration defects in small damascene Cu interconnects with their microstructure

Horst Wendrock, Kabir Mirpuri, Siegfried Menzel, Günther Schindler, Klaus Wetzig

Journal:

Microelectronic Engineering

Year:

2005

Language:

english

File:

PDF, 231 KB

english, 2005

2

Comparison of modeling calculations with experimental results for direct current glow discharge optical emission spectrometry

Annemie Bogaerts, Ludger Wilken, Volker Hoffmann, Renaat Gijbels, Klaus Wetzig

Journal:

Spectrochimica Acta Part B: Atomic Spectroscopy

Year:

2001

Language:

english

File:

PDF, 214 KB

english, 2001

3

Influence of hydrogen on the analytical figures of merit of glow discharge optical emission spectroscopy?friend or foe?Presented at the 2002 Winter Conference on Plasma Spectrochemistry, Scottsdale, Arizona, January 6?12, 2002 and 11th Biennial National Atomic Spectroscopy Symposium, Loughborough University, UK, 8?10 July 2002.

Hodoroaba, Vasile-Dan, Steers, Edward B. M., Hoffmann, Volker, Unger, Wolfgang E. S., Paatsch, Wolfgang, Wetzig, Klaus

Journal:

Journal of Analytical Atomic Spectrometry

Year:

2003

Language:

english

File:

PDF, 358 KB

english, 2003

4

Microstructure and degradation mechanisms of TaSiN diffusion barriers for Cu interconnects

Engelmann, Hans-Jürgen, Hübner, René, Hecker, Michael, Mattern, Norbert, Wenzel, Christian, Zschech, Ehrenfried, Wetzig, Klaus

Journal:

Microscopy and Microanalysis

Year:

2003

Language:

english

File:

PDF, 135 KB

english, 2003

5

Comparison of modeling calculations with experimental results for rf glow discharge optical emission spectrometry

Annemie Bogaerts, Ludger Wilken, Volker Hoffmann, Renaat Gijbels, Klaus Wetzig

Journal:

Spectrochimica Acta Part B: Atomic Spectroscopy

Year:

2002

Language:

english

File:

PDF, 197 KB

english, 2002

6

Present possibilities of thin-layer analysis by GDOES

Volker Hoffmann, Roland Dorka, Ludger Wilken, Vasile-Dan Hodoroaba, Klaus Wetzig

Journal:

Surface and Interface Analysis

Year:

2003

Language:

english

File:

PDF, 360 KB

english, 2003

7

Ion Beams in Materials Processing and Analysis || Ion Beam Technology

Schmidt, Bernd, Wetzig, Klaus

Year:

2013

Language:

english

File:

PDF, 1.96 MB

english, 2013

8

The stability behaviour of hard material coatings on alloyed steel substrates

Wetzig, Klaus, Gille, Gerd, Edelmann, Johannes

Journal:

Year:

1987

Language:

english

File:

PDF, 654 KB

english, 1987

9

Laser experiments in a scanning electron microscope

Klaus Wetzig, Siegfried Menzel

Journal:

Microchimica Acta

Year:

1992

Language:

english

File:

PDF, 1.36 MB

english, 1992

10

DC- and RF-GD-OES measurements of adsorbed organic monolayers on copper

Denis Klemm, Volker Hoffmann, Klaus Wetzig, Jürgen Eckert

Journal:

Analytical and Bioanalytical Chemistry

Year:

2009

Language:

english

File:

PDF, 300 KB

english, 2009

11

Reactive Species Generated during Wet Chemical Etching of Silicon in HF/HNO 3 Mixtures

Steinert, Marco, Acker, Jörg, Krause, Matthias, Oswald, Steffen, Wetzig, Klaus

Journal:

Journal of Physical Chemistry B

Year:

2006

Language:

english

File:

PDF, 316 KB

english, 2006

12

Metal Based Thin Films for Electronics (WETZIG:THIN FILMS O-BK) || Thin Film Preparation and Characterization Technique

Wetzig, Klaus, Schneider, Claus M.

Year:

2003

Language:

english

File:

PDF, 2.53 MB

english, 2003

13

XPS and SIMS Examination of Alumina Fibres Affected with Mg and MgLi Melt

Stanislav Kúdela, Steffen Oswald, Stanislav Kúdela Jr., Stefan Baunack, Klaus Wetzig

Journal:

Microchimica Acta

Year:

2000

Language:

english

File:

PDF, 127 KB

english, 2000

14

Quantitative depth profiling in glow discharge spectroscopies – A new deconvolution technique to separate effects of an uneven erosion crater shape

F. Präßler, Volker Hoffmann, Joachim Schumann, Klaus Wetzig

Journal:

Analytical and Bioanalytical Chemistry

Year:

1996

Language:

english

File:

PDF, 246 KB

english, 1996

15

Metal Based Thin Films for Electronics (WETZIG:THIN FILMS O-BK) || Challenges for Thin Film Systems Characterization and Optimization

Wetzig, Klaus, Schneider, Claus M.

Year:

2003

Language:

english

File:

PDF, 4.86 MB

english, 2003

16

Analysis of nanoscale multilayers by EDXS and EELS in the STEM

Jürgen Thomas, Timon Fliervoet, Klaus Wetzig

Journal:

Applied Surface Science

Year:

2001

Language:

english

File:

PDF, 201 KB

english, 2001

17

Local damage of HT-materials by laser irradiation in the SEM

Siegfried Menzel, Uwe Rossek, Klaus Wetzig, Juliane Kadner, Wolfgang Hauffe

Journal:

Microchimica Acta

Year:

1997

Language:

english

File:

PDF, 1.18 MB

english, 1997

18

Comparison of depth resolution for direct current and radiofrequency modes in glow discharge optical emission spectrometry

Pr��ler, Frank, Hoffmann, Volker, Schumann, Joachim, Wetzig, Klaus

Journal:

Journal of Analytical Atomic Spectrometry

Year:

1995

Language:

english

File:

PDF, 588 KB

english, 1995

19

Metal Based Thin Films for Electronics (WETZIG:THIN FILMS O-BK) || Devices

Wetzig, Klaus, Schneider, Claus M.

Year:

2003

Language:

english

File:

PDF, 1.49 MB

english, 2003

20

13th Applied Surface Analysis Workshop (AOFA 13)

Journal:

Applied Surface Science

Year:

2005

Language:

english

File:

PDF, 64 KB

english, 2005

21

Non-destructive depth profile analysis using synchrotron radiation excited XPS

Michael Zier, Steffen Oswald, Rainer Reiche, Klaus Wetzig

Journal:

Microchimica Acta

Year:

2006

Language:

english

File:

PDF, 145 KB

english, 2006

22

Oxidation Behaviour of PACVD-(Ti,Al)N Wear Resistance Layers

Siegfried Menzel, Thomas Göbel, Stefan Baunack, Karl Bartsch, Klaus Wetzig

Journal:

Microchimica Acta

Year:

2000

Language:

english

File:

PDF, 327 KB

english, 2000

23

Ion Beams in Materials Processing and Analysis || Materials Processing

Schmidt, Bernd, Wetzig, Klaus

Year:

2013

Language:

english

File:

PDF, 3.78 MB

english, 2013

24

10.1039/b105441b

Plotnikov, Alexei, Vogt, Carla, Hoffmann, Volker, TÃ¤schner, Christine, Wetzig, Klaus

Journal:

Journal of Analytical Atomic Spectrometry

Year:

2001

Language:

english

File:

PDF, 173 KB

english, 2001

25

Application of Different Analytical Methods to the Precise Analysis of Stoichiometry and Homogeneity of Superconducting Y, Ni- and Ho, Ni-Borocarbides

Alexei Plotnikov, Rolf Kucharkowski, Carla Vogt, Günther Behr, Klaus Wetzig

Journal:

Zeitschrift für anorganische und allgemeine Chemie

Year:

2002

Language:

english

File:

PDF, 39 KB

english, 2002

26

Glass–ceramic route of BSCCO superconductors – Fabrication of amorphous precursor

Andreas Nilsson, Wolfgang Gruner, Jörg Acker, Klaus Wetzig

Journal:

Physica C: Superconductivity

Year:

2007

Language:

english

File:

PDF, 90 KB

english, 2007

27

Depth profiling of electrically non-conductive layered samples by RF-GDOES and HFM plasma SNMS

Vasile-Dan Hodoroaba, Wolfgang E.S Unger, Holger Jenett, Volker Hoffmann, Birgit Hagenhoff, Sven Kayser, Klaus Wetzig

Journal:

Applied Surface Science

Year:

2001

Language:

english

File:

PDF, 368 KB

english, 2001

28

Analysis of Nanoscale Co Pillars by Means of ATEM

Thomas, Jürgen, Brückner, Winfried, Schneider, Claus M., Wetzig, Klaus

Journal:

Microscopy and Microanalysis

Year:

2003

File:

PDF, 391 KB

2003

29

Potential candidates of certified reference material for determination of hydrogen concentration with glow discharge optical emission spectrometry (GD-OES)—a feasibility study

Hodoroaba, Vasile-Dan, Klemm, Denis, Reinholz, Uwe, Strub, Erik, Röhrich, Jörg, Bohne, Wolfgang, Hoffmann, Volker, Wetzig, Klaus

Journal:

Journal of Analytical Atomic Spectrometry

Year:

2008

Language:

english

File:

PDF, 228 KB

english, 2008

30

Fracture behavior of Mg–Li matrix composites

Kúdela, Stanislav, Wendrock, Horst, Kúdela, Stanislav, Pawełek, Andrzej, Piątkowski, Andrzej, Wetzig, Klaus

Journal:

International Journal of Materials Research (formerly Zeitschrift fuer Metallkunde)

Year:

2009

Language:

english

File:

PDF, 352 KB

english, 2009

31

Metal Based Thin Films for Electronics (WETZIG:THIN FILMS O-BK) || Index

Wetzig, Klaus, Schneider, Claus M.

Year:

2003

Language:

english

File:

PDF, 95 KB

english, 2003

32

AIP Conference Proceedings [AIP The fifth international workshop on stress induced phenomena in metallization - Stuttgart (Germany) (23-25 June 1999)] - In-situ study of interconnect failures by electromigration inside a scanning electron microscope

Wetzig, Klaus, Wendrock, Horst, Buerke, Axel, Kötter, Thomas

Year:

1999

File:

PDF, 1.03 MB

1999

33

Emission spectra of copper and argon in an argon glow discharge containing small quantities of hydrogen

Hodoroaba, Vasile-Dan, Hoffmann, Volker, Steers, Edward B. M., Wetzig, Klaus

Journal:

Journal of Analytical Atomic Spectrometry

Year:

2000

Language:

english

File:

PDF, 234 KB

english, 2000

34

Mn Valency at La0.7Sr0.3MnO3/SrTiO3 (0 0 1) Thin Film Interfaces

Riedl, Thomas, Gemming, Thomas, Dörr, Kathrin, Luysberg, Martina, Wetzig, Klaus

Journal:

Microscopy and Microanalysis

Year:

2009

Language:

english

File:

PDF, 704 KB

english, 2009

35

Metal Based Thin Films for Electronics (WETZIG:THIN FILMS O-BK) || Thin Film Systems: Basic Aspects

Wetzig, Klaus, Schneider, Claus M.

Year:

2003

Language:

english

File:

PDF, 2.88 MB

english, 2003

36

Phase Equilibria in the Ternary System Fe-Gd-Mo at 600 °C

Matvei Zinkevitch, Norbert Mattern, Horst Wendrock, Klaus Wetzig

Journal:

Microchimica Acta

Year:

2000

Language:

english

File:

PDF, 368 KB

english, 2000

37

Implantierbare Mikrodosierpumpe

Forke, Klaus, , Uhlemann, Jürgen, , Lange, Petrick, , Wetzig, Thomas, , König, Gerhard

Journal:

Biomedical Engineering/ Biomedizinische Technik

Year:

1990

Language:

german

File:

PDF, 574 KB

german, 1990

38

Metal Based Thin Films for Electronics (WETZIG:THIN FILMS O-BK) || Introduction

Wetzig, Klaus, Schneider, Claus M.

Year:

2003

File:

PDF, 171 KB

2003

39

Behavior of (1 1 1) grains during the thermal treatment of copper film studied in situ by electron back-scatter diffraction

Kabir-kumar Mirpuri, Horst Wendrock, Klaus Wetzig, Jerzy Szpunar

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 1.02 MB

english, 2006

40

Metal Based Thin Films for Electronics (WETZIG:THIN FILMS O-BK) || Front Matter

Wetzig, Klaus, Schneider, Claus M.

Year:

2003

File:

PDF, 216 KB

2003

41

Nanostructured graphite prepared by ball-milling at low temperatures

Melanie Hentsche, Helmut Hermann, Thomas Gemming, Horst Wendrock, Klaus Wetzig

Journal:

Year:

2006

Language:

english

File:

PDF, 382 KB

english, 2006

42

In-situ characterization of MgLi composite materials by means of AES and factor analysis

Stefan Baunack, Andreas John, Stanislav Kúdela, Klaus Wetzig

Journal:

Microchimica Acta

Year:

1997

Language:

english

File:

PDF, 569 KB

english, 1997

43

A theoretical approach to the interpretation of the transient data in scanning laser ablation inductively coupled plasma mass spectrometry: Consideration of the geometry of the scanning area

Alexei Plotnikov, Carla Vogt, Klaus Wetzig, Antonios Kyriakopoulos

Journal:

Spectrochimica Acta Part B: Atomic Spectroscopy

Year:

2008

Language:

english

File:

PDF, 769 KB

english, 2008

44

Investigations of the effect of hydrogen in an argon glow discharge

Hodoroaba, Vasile-Dan, Hoffmann, Volker, Steers, Edward B. M., Wetzig, Klaus

Journal:

Journal of Analytical Atomic Spectrometry

Year:

2000

Language:

english

File:

PDF, 248 KB

english, 2000

45

Microstructure of Al/Ti Metallization Layers

Hofmann, Matthias, Gemming, Thomas, Menzel, Siegfried, Wetzig, Klaus

Journal:

Zeitschrift für Metallkunde

Year:

2003

Language:

english

File:

PDF, 489 KB

english, 2003

46

Critical aspects on preparation of Bi-2223 glassy precursor by melt-process

Andreas Nilsson, Wolfgang Gruner, Jörg Acker, Klaus Wetzig

Journal:

Journal of Non-Crystalline Solids

Year:

2008

Language:

english

File:

PDF, 629 KB

english, 2008

47

Damascene technique applied to surface acoustic wave devices

Reitz, Daniel, Thomas, Juergen, Schmidt, Hagen, Menzel, Siegfried, Wetzig, Klaus, Albert, Matthias, Bartha, Johann W.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2007

Language:

english

File:

PDF, 832 KB

english, 2007

48

Nanoscale Co/Cu Multilayers Investigated by Analytical TEM and AES

Jürgen Thomas, Andreas John, Klaus Wetzig

Journal:

Microchimica Acta

Year:

2000

Language:

english

File:

PDF, 289 KB

english, 2000

49

Ion Beams in Materials Processing and Analysis ||

Schmidt, Bernd, Wetzig, Klaus

Year:

2013

Language:

english

File:

PDF, 43 KB

english, 2013

50

The effect of small quantities of hydrogen on a glow discharge in neon. Comparison with the argon case

Hodoroaba, Vasile-Dan, Steers, Edward B. M., Hoffmann, Volker, Wetzig, Klaus

Journal:

Journal of Analytical Atomic Spectrometry

Year:

2001

Language:

english

File:

PDF, 482 KB

english, 2001

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